Lithography
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Model ID: LITHO
Download Lithography Software Datasheet 
Script Mode
The software uses a script of commands to move the probe in a pre-determined pattern over a surface. The two commands are: “movement” and “hold”. During a movement and hold command, the voltage and force on the probe can be varied.
25 x 25 µm image of lines made in PMMA surface. Each line is 1 µm apart. Force of the probe on the surface was varied on each of the lines.
20 x 20 µm image of indents made in PMMA surface. Spacing between the indents is 1 µm and the force of the indents is increased from the bottom left to top right.
A MOVEMENT command consists of 5 numbers (no letters) separated by commas: They represent X, Y, Velocity, Setpoint%, and Z_DAC voltage
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X and Y are the coordinates in micron from the image plot.
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Velocity is the speed from one point to the next listed point in nm/sec.
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Setpoint% is the percent value of the existing setpoint.
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Z_DAC voltage is a voltage in the range of 0 to +5V which may be applied to the probe.
A HOLD command consists of 3 numbers (no letters) separated by commas: They represent Setpoint%, Z_DAC voltage, and Delay Time (ms)
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Setpoint% is the percent value of the existing setpoint.
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Z_DAC voltage is a voltage in the range of 0 to +5V which may be applied to the probe.
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Delay time(ms) is the time in milliseconds that the probe is held in its present position.
The script lithography software window allows a user to load a scripting file. Once loaded, the pattern that will be made is displayed in an image window. When the start button is pressed, the script is implemented and the specifics of each step are listed in the window. A green light is displayed when the script is completed.
Advanced Mode
In advanced mode, lithographic patterns can be created directly on an AFM image. The desired pattern is created on the image using a series of mouse clicks and the entering the desired lithographic process such as force or voltage. Besides drawing complex patterns, this option is useful for cutting features in an AFM image.
Example Script File
File Name:
Lithography.txt
Description:
X, Y, Velocity, Setpoint%,
Z_DAC voltage
Setpoint%, Z_DAC voltage,
Delay Time (ms)
Script:
10,10, 20000, 100,0
10,40, 20000, 100,0
40,40, 20000, 50, 5
40, 10, 20000, 110, 1
100, 2.33, 2000
90,5,1000
25, 25, 30000, 50, 5
101,5,20
30, 25, 30000, 50, 5
105,4,20
35, 25, 30000, 50, 5
110,3,20
40, 25, 30000, 50, 5
115,3,20
100,3,20
Included With The Option
- PMMA sample
- Manual
- Plug for rear of unit
- Two probes
