NP-AFM

Nano-Profiling AFM
For process control and development

The NP-AFM is a nanoprofiler for analysis of features such as surface roughness and metrology of technical samples. Primary applications for the NP-AFM include process development and process control of technical samples.

FROM
$37,995.00

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Description

The NP-Atomic Force Microscope is a complete nanoprofiler tool including everything required for scanning samples: microscope stage, electronic box, control computer, probes, manuals, and a video microscope. Samples as large as 200 mm X 200 mm X 20 mm are profiled by the NP-AFM system, and several stage options are available for many types of samples.

NP-AFM Details

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Overview
Stage
EBOX
Software
Video Microscope
Probe Holder
Gallery
Modes
Options
Specifications
NP-AFM Overview
High Resolution Video Microscope Readily locate Features for Scanning
Multiple Sample Stage or Vacuum Chuck Optimized for specific technical samples
Closed Loop XY scanner Great accuracy with rapid zoom to feature
Probe Exchange Tool Reduce time for probe exchange
In plane flexure XY scanner Minimal out of plane motion in images
Labview software with USB communication Readily adaptable to new operating systems
Uses Industry standard probes Probes for specific measurements are readily available.
Includes Vibrating, Non-Vibrating modes Turnkey system
Pricing

From $35,000.00*
*Plus purchase of selected Z Scanner:
Z scanner 7µm -or-
Z scanner with strain gauge 16µm

Download: NP-AFM Product Datasheet PDF

 

Nano-Profiler AFM Overview

The NP-AFM is a complete nanoprofiler tool including everything required for scanning samples: microscope stage, electronic box, control computer, probes, manuals, and a video microscope. Samples as large as 200 mm X 200 mm X 20 mm are profiled by the NP-AFM system, and several stage options are available for many types of samples. The Nano-Profiler AFM is primarily used for routine scanning of technical samples such as wafers and disks or for nanotechnology research.

Key Features of the NP-AFM

Nano-Profiling AFM

The NP-AFM accommodates industry-standard sized probes and is used for profiling technical samples including wafers and disks in industry applications.

Standard Operating Modes

Vibrating mode is used for high resolution and soft samples, while non-vibrating mode can be used for routine scanning. Also included with the system are phase and lateral force modes

Three Sample Stage Options

Three sample stage options can accommodate different samples with sizes as large as 200mm X 200mm X 20mm.

Linearized X, Y Piezoelectric Scanner

Piezoelectric X and Y scanners incorporate strain gauges that provide linear scans and rapid zoom-to-feature capabilities.

Direct-Drive Tip Approach

A linear motion stage is used to move the probe perpendicular to the sample. Probe angle alignment is not required, facilitating a much faster probe approach.

LabVIEW Operation

Industry standard programming environment, functions include setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. Compatible with older operating systems as well.

Video Microscope

The video optical microscope in a NP-2 AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach.

NP-AFM Capabilities

Visualization of Surface Features

Visualization of surface features can help understand why a process is working or not working. AFM offers extreme contrast on flat samples often encountered in industry wafers and disks for quality control and assurance.

Surface Roughness/Texture

Surface roughness measurements at the nanoscale are only possible with an atomic force microscope. With the appropriate vibration isolation enclosure, it is possible to measure surface textures under 0.1 nm.

Step-Height Measurements

The NP-AFM is a stylus profiler capable of making step height measurements from 0.3 to 500 nanometers. An included video microscope is essential for locating regions of interest for scanning.

Patterned Wafer Analysis

An atomic force microscope is a very high resolution stylus profiler capable of making several types of measurements on processed wafers. The following is an example of measurements on a patterned wafer that was polished by CMP.

Below is a video microscope image of a the region where the three measurements are made. Also visible in the video microscope image is the cantilever; the red is from the laser used in the AFM force sensor. The regions where measurements are made are identified as 1, 2 and 3 in the video microscope image.

video microscope image of patterned wafer and AFM cantilever

Region 1 - Visualization

Scanning on the square identified as region 1 results in the AFM image illustrated below. At random locations in the image there are pockmarks, not visible in the video microscope image. By zooming in with the AFM, we can see in the right image that the pockmarks have debris at their edges. The width of the pockmarks is about 90 nm and the depth is 10nm.

AFM scan revealing pockmarks, .5 µm x .5 µm

Region 2 - Surface Texture

Scans of region 2 do not show noticeable surface structure, as was observed in region 1. A 3-D color scale image of region 2 is shown below. The surface roughness (Sa) of this region is 1.69 nm which is 10 times greater than the noise floor of the AFM used for generating this image.

10 µm x 10 µm AFM scan showing surface roughness of patterned wafer
Parameters  
Average value: 15.43 nm
Minimum: 7.12 nm
Maximum: 29.85 nm
Median: 15.39 nm
Ra (Sa): 1.69 nm
Rms (Sq): 2.11 nm
Skew: 0.135
Kurtosis: 0.05
Surface area: 100.166 μm²
Projected area: 100.000 μm²
Inclination θ: 0.0 deg
Inclination φ: -71.8 deg

Region 3 - Step Height Measurements

Region 3 is a series of lines that are about 1 µm wide, and are visible in the video optical microscope. An AFM image of these lines is illustrated below. Using a histogram of the AFM image the height of the lines is readily measured to be 43 nm.

Atomic force microscope scan of patterned wafer 1 µm lines and histogram for height of 43 nm

 

More Details about the NP-AFM

To read more about the NP-AFM, return to the top of the page and click on the various tabs detailing the NP-AFM and its Stage; Ebox; Software; Video Microscope; Probe Holder; Modes; Options; Specifications; and Images.

You can also see our NP-AFM Introduction video below:

NP-AFM Stage

NP-AFM Stage

The NP-AFM stage has excellent thermal and mechanical stability required for high resolution AFM profiling. Additionally, its open design facilitates user modification.

Nano Profiler Atomic Force Microscope Stage

High Resolution Z Stage

The direct drive’s Z stage controls motion down to 330 nm, assuring optimal tip approach. Software controls for the Z stage rapidly move the light lever up and down and regulate the automated probe approach.

Sample Stage

The NP-AFM has multiple stage options, including a 2x3 inch manual stage with a resolution of 2 µm, and a sample stage for wafers and discs.

Light Lever Force Sensor

An industry standard light lever force sensor is utilized in the NPAFM. Most commercially available AFM probes are accommodated in the probe holder. The light lever force sensor can make measurements in standard modes, including vibrating, non-vibrating, lateral force, and phase mode.

Video Microscope

The high resolution video microscope has a zoom tube which allows a field of view between 2 X 2 mm and .3 X .3 mm. The video microscope is essential for aligning the light lever laser, locating features for scanning, and facilitating tip approach.

XY Piezo Scanner

For XY scanning, linearized piezo electric ceramics utilize real-time feedback control to assure accurate measurements. The multiple modified tripod design (MMTD) of the xy scanner provides scans with minimal background bow.

Probe holder

A modular probe holder is used in the light lever force sensor and held in place with a spring clip. Probes can be replaced in less than two minutes with the NP-AFM’s probe exchange tool.

 
Diagram of NP-Atomic Force Microscope stage
 

NP-AFM 4012 Stage

The NP-AFM-4012 Stage is designed to accommodate many sample shapes and sizes. The stage comes with a holder for 6 standard AFM magnetic disks. Custom sized sample holders may be readily designed and added to the stage.


Atomic force microscope stage for wide variety of sample sizes and shapes

 

NP-AFM 4022 Stage

Wafers and discs up to 8” in diameter are accommodated by the NP-AFM 4022 stage. The vacuum chuck has a unique design that holds the samples firmly while also enabling quick adjustments to accommodate varying diameters of sample sizes. There is a “two-tiered” translation system to locate features for AFM imaging.


NP atomic force microscope vacuum stage


Screws with o-ring seals are provided and allow selection of the correct vacuum chuck diameter.

 

NP-AFM EBOX

NP-AFM EBOX

Electronics in the NP-AFM are constructed around industry standard USB data acquisition electronics. The critical functions, such as xy scanning, are optimized with a 24-bit digital to analog converter. With the analog z feedback loop, the highest fidelity scanning is possible. Vibrating mode scanning is possible with both phase and amplitude feedback using the high sensitivity phase detection electronics.

24-bit Scan DAC

Scanning waveforms for generating precision motion in the X-Y axis with the piezo scanners are created with 24 bit DACS driven by a 32 bit micro controller. With 24 bit scanning, the highest resolution AFM images may be measured. Feedback control using the xy strain gauges assures accurate tracking of the probe over the surface.


Phase and Amplitude Detector Circuit

Phase and amplitude in the Ebox are measured with highly stable phase and amplitude chips. The system can be configured to feedback on either phase or amplitude when scanning in vibrating mode.


Signal Accessible

At the rear of the Ebox is a 50 pin ribbon cable gives access to all the primary electronic signals without having to open the EBox.


Precision Analog feedback

Feedback from the light lever force sensor to the Z piezoceramic is made using a precision analog feedback circuit. The position of the probe may be fixed in the vertical direction with a sample-and-hold circuit.


Variable Gain High Voltage Piezo Drivers

Improved signal to noise ratio, as well as extremely small scanning ranges, are possible with the variable gain high voltage piezo drivers.

 

Electronic Box for Atomic Force Microscope

 

NP-AFM Software

NP-AFM Software

Software for acquiring images is designed with the industry standard LabVIEW™ programming visual interface instrument design environment. There are many standard functions, including setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. LabVIEW™ facilitates rapid development for those users seeking to enhance the software with additional special features. LabVIEW also enables the NP-AFM to be readily combined with any other instrument using LabVIEW.

Prescan Window for NP-AFM

Pre-scan Window

A pre-scan window includes all of the functions that are required before a scan is started. The functions are presented in a logical sequence on the screen.

 

NP-AFM Scanning Software window

Scan Window

Once all of the steps in the pre-scan window are completed, the scan window is used for measuring images. Scan parameter, Z feedback parameters, and image view functions may be changed with dialogs on this screen.

 

NP-AFM Force Distance Curve Window

Force/Distance Curves

There is a tab for measuring F/D curves in the AFMWorshop software. Data is exported to a .csv file for analysis in standard programs such as Microsoft Excel™.

 

LabVIEW software window for Atomic Force Microscope

LabVIEW Window

Industry standard programming environment. Readily customized and modified for specialized applications. Instrumentation already using LabVIEW can be added to the NP-AFM to create new capabilities.

 

 

AFM Image Analysis Software

Included with the NP-AFM is the Gwyddion open source SPM image analysis software. This complete image analysis package has all the software functions necessary to process, analyze and display SPM images.

AFM Image Analysis Software Menu

  • visualization: false color representation with different types of mapping
  • shaded, logarithmic, gradient- and edge-detected, local contrast representation, Canny lines
  • OpenGL 3D data display: false color or material representation
  • easily editable color maps and OpenGL materials
  • basic operations: rotation, flipping, inversion, data arithmetic, crop, resampling
  • leveling: plane leveling, profiles leveling, three-point leveling, facet leveling, polynomial background removal, leveling along user-defined lines
  • value reading, distance and angle measurement
  • profiles: profile extraction, measuring distances in profile graph, profile export
  • filtering: mean, median, conservative denoise, Kuwahara, minimum, maximum, checker pattern removal
  • general convolution filter with user-defined kernel
  • statistical functions: Ra, RMS, projected and surface area, inclination, histograms, 1D and 2D correlation functions, PSDF, 1D and 2D angular distributions, Minkowski functionals, facet orientation analysis
  • statistical quantities calculated from area under arbitrary mask
  • row/column statistical quantities plots
  • ISO roughness parameter evaluation
  • grains: threshold marking and un-marking, watershed marking
  • grain statistics: overall and distributions of size, height, area, volume, boundary length, bounding dimensions
  • integral transforms: 2D FFT, 2D continuous wavelet transform (CWT), 2D discrete wavelet transform (DWT), wavelet anisotropy detection
  • fractal dimension analysis
  • data correction: spot remove, outlier marking, scar marking, several line correction methods (median, modus)
  • removal of data under arbitrary mask using Laplace or fractal interpolation
  • automatic xy plane rotation correction
  • arbitrary polynomial deformation on xy plane
  • 1D and 2D FFT filtering
  • fast scan axis drift correction
  • mask editing: adding, removing or intersecting with rectangles and ellipses, inversion, extraction, expansion, shrinking
  • simple graph function fitting, critical dimension determination
  • force-distance curve fitting
  • axes scale calibration
  • merging and immersion of images
  • tip modeling, blind estimation, dilation and erosion
NP-AFM Video Microscope

NP-AFM Video Microscope

A video optical microscope in an AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach. The NP-AFM includes a high performance video optical microscope along with a 3 mega pixel ccd camera, light source, microscope stand, and Windows software for displaying images.

TT-AFM Video Optical Microscope shows test structureHere the video optical microscope allows viewing features on a test structure. The AFM cantilever is on the right. Three images show results of areas selected for AFM scanning.

TT-AFM Video Microscope on HOPGThe video optical microscope zooms in to show an HOPG sample surface and the AFM cantilever.

 

TT-AFM laser alignment through video microscope

Laser alignment is greatly facilitated with the video optical microscope. This non-vibrating cantilever is 450 µm long. The red spot is from the laser reflecting off the cantilever.

 

 

NP-AFM Probe Holder

NP-AFM Probe Holder & AFM Probe Exchange Tool

The NP-AFM utilizes a unique probe holder/exchange mechanism. Probes are held in place with a spring device that mates with a probe exchange tool. This combination makes changing probes fast and easy on the NP-AFM.

 

Probe Holder/Exchange

 

NP-AFM Image Gallery

AFM Workshop Image Gallery

Marks made with AFM Lithography 20 um x 20 µm

Marks made with AFM Lithography; 20 µm x 20 µm

1 nm and 3 nm particles test sample. 500 nm x 500 nm

1 nm and 3 nm particles test sample. 500 nm x 500 nm AFM image

Nanolithography, 25 µm x 25 µm image

Nanolithography, Changing Probe Force. 25 µm x 25 µm image of lines made in PMMA surface. Each line is 1 µm apart; each has differing probe force.

1 nm and 3 nm particles test sample 100 nm x 100 nm

1 nm and 3 nm particles, test sample. 100 nm x 100 nm

Highly Oriented Pyrolitic Graphite 5 µm x 5 µm

Highly Oriented Pyrolitic Graphite, HOPG 5 µm x 5 µm, showing atomic steps

Latex spheres; 3 µm x 3 µm; 173 nm spheres

Latex spheres; 3 µm x 3 µm; 173 nm latex spheres AFM Image

Ruled Grating Irregularities, 3-D image

Ruled Grating Irregularities, 3-D image, 4 µm x 4 µm

Multiphase Polymer Film, 3D, phase signal overlaid

Multiphase Polymer Film - 3D shape from topography with phase signal overlaid as color

Defects on 0.3 nm Si Terraces, 4 µm x4 µm

AFM image of defects on 0.3 nm Si Terraces, 4 µm x 4 µm

3 µm x 3 µm image of 173 nm latex spheres

Latex spheres; 3 µm x 3 µm image of 173 nm latex spheres

AFM Workshop Image DNA 3um r1 pm

AFM Workshop Image DNA 3um r1 pm

Aluminum foil, 3D image; 50 µm x 50 µm

Aluminum foil, 3D AFM image; 50 µm x 50 µm.

SiC Terraces, 6 µm x 6 µm AFM image

SiC Terraces; 6 µm x 6 µm, AFM image

Aluminum foil, dull side, 3-D image; 50 µm x 50 µm.

Aluminum foil, dull side, 3D image; 50 µm x 50 µm.

Self-assembled lipid nanotubes; 20 µm x 20 µm.

Self-assembled lipid nanotubes; 20 µm x 20 µm, AFM image.

Red blood cells, 30 µm x 30 µm 2D red color scale

Red blood cells, 30 µm x 30 µm 2D red color scale

Self-assembled lipid nanotubes, 5 µm x 5 µm

Self-assembled lipid nanotubes, 5 µm x 5 µm

Red blood cells 3-D AFM image

Red blood cells 3D AFM image

Polymer used in glue, 2D light shaded view

Polymer used in common glue, 10 µm x 10 µm images, 2-D light shaded view

MFM image of magnetic disk; 40 µm x 40 µm

MFM image of magnetic disk; 40 µm x 40 µm

Polymer used in glue 10 µm x 10 µm 3D color scale

Polymer used in common glue 10 µm x 10 µm image, 3-D color scale view

Inverted Optical microscope image of Caco-2 cells

Inverted Optical microscope image of Caco-2 cells; box indicates area selected for AFM scanning

20 µm X 20 µm AFM image of SHS 100 nm test pattern

20 µm X 20 µm AFM image of SHS 100 nm test pattern, color view

AFM scan of Caco-2 cells; 48 µm x 48 µm.

AFM image of Caco-2 cells; 48 µm x 48 µm. AFM scan of area selected by box in previous inverted optical microscope photo

Inverted optical Image of neutraphil a1 cells

Inverted optical image of neutraphil a1 cells, inverted optical microscope view, AFM probe is shadow

Tip checker sample, 2-D color scale

Tip checker sample, 2-D color scale 20 µm x 20 µm image

Neutrophil & erythrocyte cells; 50 µm light shaded

Neutrophil & erythrocyte cells; 50 µm light shaded

Caco-2 cells. Left: Epiflourescence. Right: AFM

Caco-2 cells. Left: Epiflourescence image of Caco-2 cells treated with quantum dots. Right: 50 µm x 50 µm AFM image of Caco-2 cells

Silicon test pattern 40 µm x 40 µm grey scale image

Silicon test pattern 40 µm x 40 µm grey scale image

Holes in polymer film, 10 µm x 10 µm AFM Image

Holes in polymer film, 10 µm x 10 µm AFM Image

Silicon test pattern, 7 µm x 7 µm zoomed in image

Silicon test pattern, 7 µm x 7 µm zoomed in image of particle viewed in the upper center of the left image.

Multiphase polymer height image

Multiphase polymer height image; 10 µm x 10 µm

Patterns on ferroelectric material 50 µm x 50 µm

Patterns on ferroelectric material 50 µm x 50 µm light shaded image.

Multiphase polymer 10 µm x 10 µm, phase image.

Multiphase polymer 10 µm x 10 µm, phase image.

Light shaded image of cell, 7 µm x 7 µm AFM Image

Light shaded image of cell, 7 µm x 7 µm AFM Image

Vibrating mode showing three species of bacteria

Vibrating mode image showing three different species of bacteria

Bacteria, phase mode image

Bacteria, phase mode image 3 µm x 3 µm image of a single bacteria

Amplitude Image of Leishmania 25 µm x 25 µm

Amplitude Image of Leishmania parasites 25 µm x 25 µm

Scratch mark in metal 10 µm x 10 µm color scale

Scratch mark in a metal surface, 10 µm x 10 µm color scale image

Bacteria spore mutants 30 µm x 30 µm AFM image

Bacteria spore mutants 30 µm x 30 µm AFM image

Waffle test pattern, 2100 lines per mm, 8 µm x 8 µm color scale image

Waffle test pattern, 2100 lines per mm, 8 µm x 8 µm color scale image

Indium Tin Oxide (ITO), 2 µm x 2 µm color scale image

Indium Tin Oxide (ITO), 2 µm x 2 µm color scale image

Tobacco Mosaic Virus 1.2 µm x 1.2 µm color scale

Tobacco Mosaic Virus, 1.2 µm x 1.2 µm color scale image of 17 nm diameter single TMV

Conductive AFM scan, standard reference sample

Conductive AFM scan, standard reference sample, 10 µm x 10 µm conductivity image 

Atomic terraces on metal surface, 5 µm x 5 µm

Atomic terraces on metal surface, 5 µm x 5 µm AFM image

0.3 nm terraces on Si, 5 µm x 5 µm color scale image

0.3 nm terraces on Si, 5 µm x 5 µm color scale image

0.3 nm terraces on Si 10 µm x 10 µm error signal image.

0.3 nm terraces on Si 10 µm x 10 µm error signal image. At the bottom right of this image is a 50 nm step.

Gold nanoparticles 2D color scale 14 nm diameter

Gold nanoparticles, 2D color scale 2 µm x 2 µm image of 14 nm diameter particles

Gold nanoparticles 3D color scale 14 nm diameter

Gold nanoparticles, 3-D color scale 2 µm x 2 µm image of 14 nm diameter particles

Phase mode of PMMA 300 nm x 300 nm

Phase mode image of PMMA 300nm x 300nm AFM image

 HOPG, 4 µm x 4 µm

Highly Oriented Pyrolitic Graphite (HOPG), 4 µm x 4 µm

DNA; 1 µm x 1 µm AFM image

DNA; 1 µm x 1 µm AFM image

DNA; 1.5 µm x 1.5 µm

DNA; 1.5 µm x 1.5 µm

DNA 2 µm x 2 µm, on multiple mica layers

DNA 2 µm x 2 µm, on multiple mica layers

DNA; 1.5 µm x 1.5 µm AFM image

DNA; 1.5 µm x 1.5 µm AFM

DVD: 6 µm x 6 µm AFM image

DVD: 6 µm x 6 µm AFM image

6µm x 6µm AFM scan of graphene

AFM scan, Graphene 6µm x 6µm

2µm x 2µm AFM image, Graphene sample

Graphene sample, AFM image 2µm x 2µm

HOPG 2 µm x 2 µm

Highly Oriented Pyrolitic Graphite, HOPG 2 µm x 2 µm, AFM Image

Small scan of microterraces on previous image

STEPP sample: 3 µm x 3 µm, small scan zoom of microterraces observed on the previous 16 µm x 16 µm image

STEPP: smaller scale zoom to view microterraces

STEPP scan: 3 µm x 3 µm, smaller scale zoom to view microterraces seen on previous 16 µm x 16 µm scan

Epithelial Cell 35 µm x 35 µm, 3D AFM image

Epithelial Cell 35 µm x 35 µm, 3D AFM image

STEPP: 16 µm x 16 µm, showing microterraces

STEPP: 16 µm x 16 µm, showing microterraces on terrace, see features in smaller scans 

Cardiomyocytes; inverted optical miroscope image

Cardiomyocytes; inverted optical miroscope image showing location of AFM probe from below

Polystyrene Nanoparticles: Binodal distribution

Polystyrene Nanoparticles: Binodal distribution of nanoparticles, 20 nm and 100 nm

BOPP polymer film; 2 µm x 2 µm.

BOPP Polymer; 2 µm x 2 µm biaxially oriented polypropylene (BOPP) film.

Calibration reference - 40 µm x 40 µm x 1 µm

Calibration reference - 40 µm x 40 µm x 1 µm

AFM height image of DNA

DNA AFM height image, 2 µm x 2 µm

E. coli cell, displaying fimbriae & polar flagellum

Single E. coli bacterial cell, displaying fimbriae & polar flagellum

Epithelial cell in liquid, 32 µm x 32 µm AFM image

Epithelial cell in liquid, 32 µm x 32 µm AFM image

Gold Nanoparticles, 100 nm

Gold Nanoparticles, 100 nm

Gold Nanoparticles, 20 nm AFM Image

Gold Nanoparticles, 20 nm AFM Image

Graphene sample, AFM image 11 µm x 11 µm

Graphene sample, AFM image 11 µm x 11 µm

Ruled Grating Irregularities, ruled diffraction grating

Ruled Grating Irregularities, 4 µm x 4 µm ruled diffraction grating, irregularities at edges of the apex on grating lines.

Cardiomyocytes; LS-AFM inverted optical microscope

Cardiomyocytes from the LS-AFM inverted optical microsope

MEMS Multiple Level Gear, Courtesy TX Tech, Sandia Ntl. Labs

MEMS Multiple Level Gear, Courtesy TX Tech, Sandia Ntl. Labs

MEMS High Performance Comb-Drive Actuator. Courtesy TX Tech, Sandia Ntl. Labs

MEMS High Performance Comb-Drive Actuator. Courtesy TX Tech, Sandia Ntl. Labs

Mutant bacteria spores; 30 µm x 30 µm.

Mutant bacteria spores; 30 µm x 30 µm.

Donut shaped particles 2.5 µm x 2.5 µm

Donut shaped nanoparticles, 2.5 µm x 2.5 µm.

Gold nanotriangles

Gold nanotriangles

Patterned wafer after CMP; 50 µm x 50 µm

Structures on patterned wafer after CMP; 50 µm x 50 µm

Polished surface, 3D AFM image; 30 µm x 30 µm

Polished surface, 3D AFM image; 30 µm x 30 µm

Three component polymer phase image; 5µm x 5µm

Three component polymer, AFM phase image; 5µm x 5µm

Oriented polypropylene showing network of fibers

Oriented polypropylene showing network of fibers; 10 µm x 10 µm.

Thermoplastics and rubbers blend. Phase image.

Thermoplastics and rubbers blend. AFM phase image shows differentiation of components in sample; 5 µm x 5 µm.

SEBS polymer; phase image 1 µm x 1 µm.

SEBS polymer (styrene/ethylene/butylene polymer); AFM phase image, 1 µm x 1 µm.

SEBS polymer, AFM topography, 1 µm x 1 µm.

SEBS polymer (styrene/ethylene/butylene polymer); AFM topography image, 1 µm x 1 µm.

SEBS polymer, phase image. 500 nm x 500 nm

SEBS polymer, phase image. 500 nm x 500 nm, smallest domains ~10 nm easily visible

Quantum dots, 3D AFM image, 1.5µm x 1.5 µm

Quantum dots, 3D AFM image, 1.5µm x 1.5 µm

Polymer, AFM phase image; 19 µm x 19 µm.

Polymer, AFM phase image; 19 µm x 19 µm.

Silicon wafer, AFM scan; 10 µm x 10 µm.

Silicon wafer, AFM scan; 10 µm x 10 µm.

Silicon wafer, 3D AFM scan; 10 µm x 10 µm.

Silicon wafer, 3D AFM scan; 10 µm x 10 µm.

Patterned wafer polished by CMP

Patterned wafer polished by CMP 10 µm x 10 µm on left; square shows area selected for AFM scanning at .5 µm x .5 µm. AFM scan reveals pockmarks on surface.

Patterned wafer polished by CMP, 10 µm x 10 µm

Patterned wafer polished by CMP, 3-D color scale. Analysis revealed surface roughness (Sa) of 1.69 nm

Nanoparticles, 3 µm x 3 µm

Nanoparticles, 3D projection 3 µm x 3 µm image w/nanoparticles from 4 nm to 12 nm in diameter

 

NP-AFM Modes

NP-AFM Modes

Standard with every NP-AFM are nonvibrating (NV) mode and vibrating (V) modes for creating topography scans. Additional modes included with the product are lateral force imaging and phase mode imaging. Any scanning mode that can be implemented with a light lever AFM is possible with the NP-AFM.

Modes

With the window above the resonance frequency of a cantilever is readily measured. Additionally, the phase characteristics of the probe-sample interaction may be captured.

In addition to excelling in surface structure measurement, the NP-AFM is ideal for modes measurements. For example, the images presented here are of a polymer sample. The left image is the topography image and the image at the right is the phase image, which measures the relative hardness of the polymer sample. Standard modes include lateral force, force-distance, and phase. Optional modes include conductive AFM.

Topography Image 20x20 Micron Phase Mode Image
20x20 micron image of a polymer sample. At the left is a topography image and at the right is a phase mode image

 

10 X 10 Micron topography image 10 X 10 Micron Conductive AFM Image
10 X 10 micron image of silicon sample with gold pattern. At the left is a topography image at the right is a conductive AFM image. Two of the "fingers" on the test pattern are grounded and show contrast in the conductive AFM image

 

Optional Modes

Conductive AFM

MFM

Lithography

Advanced F/D

 

NP-AFM Options

NP-AFM Options

Dunk and Scan

Open vessel probe holder used for scanning samples submerged in a liquid.

Education Samples

Package of four samples that can help students learn how to operate an AFM, and can help new AFM operators learn various AFM Applications

Conductive AFM

Measures the 2-D conductivity of sample surfaces.

MFM

Measures the surface magnetic field of a sample.

Lithography

Uses an AFM probe to alter the physical or chemical property of a sample surface.

Advanced Force Distance Curves

Measures the deflection of a cantilever as it interacts with a surface. Monitors parameters such as: Adhesion, Stiffness, Compliance, Hardness, and Contaminate Thickness.

NP-AFM Specifications

NP-AFM Specifications


40 Micron XY Scanner
Type Modified Tripod
XY Linearity < 1%
XY Range > 40 µm
XY Resolution < 3 nm closed loop
< 0.3 nm open loop
XY Actuator type Piezo
XY Sensor type Strain Gauge


16 Micron Z Scanner / Probe Holder
Noise < 0.2 nm
Strain Gauge Resolution 1 nm
Tip Angle 10 °
Z Linearity < 5%
Z Linearity-Sensor < 1%


7 Micron Z Scanner / Probe Holder
Noise < 0.12 nm
Strain Gauge Resolution na
Tip Angle 10°
Z Linearity < 5%


Light Lever AFM Force Sensor
Probe Types Industry Standard
Probe Insertion Manual
Probe Exchange Tool
Probe Holding Mechanism Clip
Vibrating Mode Piezo
Electrical Connector to Probe
Laser/Detector Adjustment Range +/- 1.5 mm
Adjustment Resolution 1 µm
Minimum Probe to Objective 25 mm
Laser Type 670 nm Diode, < 3 mW
Laser Focus <25 µm
Detector  
Type 4 Quadrant
Band Width > 500 kHz
Signals Transmitted TL, BL, TR, BR
Gain Low, High Settings
Probe sample angle 10 degrees

Digital Data Input Output
Connection USB
Scanning DAC  
Number 2
Bits 24
Frequency 7 kHz
Control DAC  
Number 2
Bits 14
Frequency 2 kHz
ADC  
Number 8
Bits 16
Frequency 48 kHz

Z Motion
Type Direct Drive
Range 25 mm
Drive Type Stepper Motor
Min. Step Size 330 nm
Slew Rate 8 mm/minute
Limit Switch Top, Bottom
Control Software – Rate, Step Size


Analog Electronics
Vibrating Mode  
Freq Range 2 kHz – 800 kHz
Output Voltage 10 Vpp
Demod. Freq TBD
Z Feedback  
Type PID
Bandwidth > 3 kHz
Sample Hold Yes
Voltage 0-150 V
XY Scan  
Voltage 0 – 150 V
Bandwidth > 200 Hz
Pan & Zoom 22 Bits
Tip Approach Cutoff < 20 µ sec.


Software
Environment LabVIEW
Operating System MS Windows
Image Acquisition Real Time Display
(2 of 8 channels)
Control Parameters  
PID Yes
Setpoint Yes
Range Yes
Scan Rate Yes
Image Rotate 0 and 90°
Laser Align Yes
Vibrating Freq. Display Yes
Force Distance Yes
Tip Approach Yes
Oscilloscope Yes
Image Store Format Industry Standard
Image Pixels 16 x 16 to 1024 x 1024
H.V. Gain Control XY and Z
Real Time Display Line Level, Light Shaded,
Grey Color Palette
Calibration System Window
Probe Center Yes

Video Microscope

 

 
Minimum Zoom
Maximum Zoom
 
Field of view
2 x 2 mm
300 x 300 µm
 
Resolution
20 µm
1.5 µm
 
Working Distance
114 mm
114 mm
 
Magnification
45X
400X
 

Computer

 

  • Industry Standard Computer & Monitor (laptop available upon request)
  • MS Windows
  • AFMWorkshop LabVIEW .exe installed
  • Video Microscope software installed

 

NP-AFM-4012

Overall XY Range 2” x 3” (5 mm x 7.6 mm)
Resolution 3 µm
Max. Sample Size 6” x 6” x 1/2”
(150 mm x 150 mm x 12 mm)

 

NP-AFM-4022

  • 8” (200 mm) Diameter Vacuum Chuck
  • Linear Range – 4” (100 mm)
  • Rotational Range – 360 degrees
  • Secondary Manual XY – 1/4” (6 mm)
  • Vacuum Required

*Z Noise performance depends greatly on the environment in which the NP-AFM operates. Best Z noise performance is obtained in a vibration free environment. Contact AFMWorkshop for more information about our vibration isolation products and recommendations.

** Every effort is made to present accurate specifications, however, due to circumstances beyond AFMWorkshop’s control, specifications are subject to change.

 

NP-AFM Product Datasheet PDF

AFM Money Back Guarantee

See full Atomic Force Microscopes price list

AFMWorkshop Provides a 100% Money Back Guarantee

If our AFMs can't run your application, we will refund the full purchase price!

Additionally, our AFMs are now backed by a two-year, return-to-factory warranty. 

Contact us to take advantage of this offer (888)671-5539 or info@afmworkshop.com 

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