AFM Workshop

Atomic Force Microscope Manufacturer

NP AFM

Nano-Profiling AFM
For process control and development

The NP AFM is a nanoprofiler for analysis of features such as surface roughness and metrology of technical samples. Primary applications for the NP AFM include process development and process control of technical samples.
Price Range*
$47,485.00 -- 
$102,721.00
* Prices vary depending on options purchased, importation taxes, and installation - training fees.

Click to Submit Inquiries or Questions

Description

NP-AFM Details

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High Resolution Video Microscope Readily locate Features for Scanning
Multiple Sample Stage or Vacuum Chuck Optimized for specific technical samples
Closed Loop XY scanner Great accuracy with rapid zoom to feature
Probe Exchange Tool Reduce time for probe exchange
In plane flexure XY scanner Minimal out of plane motion in images
Labview software with USB communication Readily adaptable to new operating systems
Uses Industry standard probes Probes for specific measurements are readily available.
Includes Vibrating, Non-Vibrating modes Turnkey system
Pricing

From $41,775.00*
*Plus purchase of selected Z Scanner:
Z scanner 7µm -or-
Z scanner with strain gauge 16µm

Download: NP AFM Product Datasheet PDFPDF icon
NP AFM-4022 3DPDF icon
NP AFM-4012 3DPDF icon
NP AFM by AFMWorkshop

Nano-Profiler AFM Overview

The NP AFM is a complete nanoprofiler tool including everything required for scanning samples: microscope stage, electronic box, control computer, probes, manuals, and a video microscope. Samples as large as 200 mm X 200 mm X 20 mm are profiled by the NP AFM system, and several stage options are available for many types of samples. The Nano-Profiler AFM is primarily used for routine scanning of technical samples such as wafers and disks or for nanotechnology research.

Key Features of the NP AFM

Nano-Profiling AFM The NP AFM accommodates industry-standard sized probes and is used for profiling technical samples including wafers and disks in industry applications.
Standard Operating Modes Vibrating mode is used for high resolution and soft samples, while non-vibrating mode can be used for routine scanning. Also included with the system are phase and lateral force modes.
Three Sample Stage Options Three sample stage options can accommodate different samples with sizes as large as 200mm X 200mm X 20mm.
Linearized X, Y Piezoelectric Scanner Piezoelectric X and Y scanners incorporate strain gauges that provide linear scans and rapid zoom-to-feature capabilities.
Direct-Drive Tip Approach A linear motion stage is used to move the probe perpendicular to the sample. Probe angle alignment is not required, facilitating a much faster probe approach.
LabVIEW Operation Industry standard programming environment, functions include setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. Compatible with older operating systems as well.
Video Microscope The video optical microscope in a NP-2 AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach.

NP AFM Capabilities

Visualization of Surface Features Visualization of surface features can help understand why a process is working or not working. AFM offers extreme contrast on flat samples often encountered in industry wafers and disks for quality control and assurance.
Surface Roughness/Texture Surface roughness measurements at the nanoscale are only possible with an atomic force microscope. With the appropriate vibration isolation enclosure, it is possible to measure surface textures under 0.1 nm.
Step-Height Measurements The NP AFM is a stylus profiler capable of making step height measurements from 0.3 to 500 nanometers. An included video microscope is essential for locating regions of interest for scanning.


The NP AFM stage has excellent thermal and mechanical stability required for high resolution AFM profiling. Additionally, its open design facilitates user modification.

High Resolution Z Stage

The direct drive’s Z stage controls motion down to 330 nm, assuring optimal tip approach. Software controls for the Z stage rapidly move the light lever up and down and regulate the automated probe approach.

Sample Stage

The NP AFM has multiple stage options, including a 2x3 inch manual stage with a resolution of 2 µm, and a sample stage for wafers and discs.

Light Lever Force Sensor

An industry standard light lever force sensor is utilized in the NP AFM. Most commercially available AFM probes are accommodated in the probe holder. The light lever force sensor can make measurements in standard modes, including vibrating, non-vibrating, lateral force, and phase mode.

Video Microscope

The high resolution video microscope has a zoom tube which allows a field of view between 2 X 2 mm and .3 X .3 mm. The video microscope is essential for aligning the light lever laser, locating features for scanning, and facilitating tip approach.

XY Piezo Scanner

For XY scanning, linearized piezo electric ceramics utilize real-time feedback control to assure accurate measurements. The multiple modified tripod design (MMTD) of the xy scanner provides scans with minimal background bow.

Probe holder

A modular probe holder is used in the light lever force sensor and held in place with a spring clip. Probes can be replaced in less than two minutes with the NP AFM’s probe exchange tool.


NanoProfiling AFM vacuum stage

NP AFM-4012 Stage

The NP AFM-4012 Stage is designed to accommodate many sample shapes and sizes. The stage comes with a holder for 6 standard AFM magnetic disks. Custom sized sample holders may be readily designed and added to the stage.


Atomic force microscope stage for wide variety of sample sizes and shapes

NP AFM-4022 Stage

Wafers and discs up to 8” in diameter are accommodated by the NP AFM-4022 stage. The vacuum chuck has a unique design that holds the samples firmly while also enabling quick adjustments to accommodate varying diameters of sample sizes. There is a “two-tiered” translation system to locate features for AFM imaging.


NanoProfiling AFM vacuum stage


Screws with o-ring seals are provided and allow selection of the correct vacuum chuck diameter.

 

Electronics in the NP AFM are constructed around industry-standard USB data acquisition electronics. The critical functions, such as XY scanning, are optimized with a 24-bit digital to analog converter. With the analog Z feedback loop, the highest fidelity scanning is possible. Vibrating mode scanning is possible with both phase and amplitude feedback using the high sensitivity phase detection electronics.

28-Bit Scanning: With 28-bit scanning, the highest resolution AFM images may be measured. Feedback control using the XY strain gauges assures accurate tracking of the probe over the surface.
Phase and Amplitude Detector Circuit: Phase and amplitude in the EBox are measured with highly stable phase and amplitude chips. The system can display phase data while using amplitude for feedback when scanning in vibrating mode.
Signal Accessible: At the rear of the EBox is a 50 pin ribbon cable that gives access to all of the primary electronic signals without having to open the EBox.
Status Lights: At the front of the EBox is a light panel that has seven lights. In the unlikely event of a circuit failure, these lights enable determination of Ebox power supply status.
Precision Analog Feedback: Feedback from the light lever force sensor to the Z piezoceramic is made using a precision analog feedback circuit. The position of the probe may be fixed in the vertical direction with a sample-and-hold circuit.
Variable Gain High Voltage Piezo Drivers: An improved signal to noise ratio, as well as extremely small scan ranges are possible with the variable gain high voltage piezo drivers.
EBox

Features:

  • Microprocessor for scan generation through 24-bit DACs
  • Low-noise, variable gain high-voltage amplifiers with PID feedback for XY scanning
  • Dimensions: Width 6” | Height 10” | Depth 14”
  • High-fidelity, low noise Z feedback circuits for accurate probe tracking
  • Phase and amplitude detection circuits for vibrating mode AFM
  • Industry-standard National Instruments USB data acquisition board
  • Internally accessible header for signal input/output
  • Eight channels of ADC for monitoring and displaying data with LabVIEW™ software

Software for acquiring images is designed with the industry standard LabVIEW™ programming visual interface instrument design environment. There are many standard functions, including setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. LabVIEW™ facilitates rapid development for those users seeking to enhance the software with additional special features. LabVIEW also enables the NP AFM to be readily combined with any other instrument using LabVIEW.

 

Pre-Scan Tab

All of the functions required before making a scan are on the pre-scan tab. This includes selecting the scan mode, visual PLD alignment, frequency scan, and automatic tip approach.

 

Pre-Scan Tab

 

 

Topo Scan Tab

Images are acquired using the Topo Scan tab. Parameters selected on the scanning tab include the scan size, scan rate, GPID parameters, and the color scale used for displaying images. Included with the scanning tab is an image buffer capability that facilitates rapid zooming in and out.

 

Scanning Tab

 

 

Modes Tabs

Software control for optional modes such as MFM, EFM, and advanced F/D are found in the modes tabs. The example shown here is of the advanced F/D mode tab. This allows fine control of all the parameters controlling acquisition of force-distance curves, as well as acquisition of F-D curve maps. Mapping of curve sin this way allows the user to locate and visualize regions of the sample with varying properties, such as presence of specific molecules, or mechanical properties.

 

Modes Tab

 

 

Image Analysis Software

Included with the NP AFM is the Gwyddion open source SPM image analysis software. This complete image analysis package has all the software functions necessary to process, analyze, and display SPM images.

Image Analysis Software

  • Visualization: false color representation with different types of mapping
  • Shaded, logarithmic, gradient- and edge-detected, local contrast representation, and Canny lines
  • OpenGL 3D data display: false color or material representation
  • Easily editable color maps and OpenGL materials
  • Basic operations: rotation, flipping, inversion, data arithmetic, crop, and resampling
  • Leveling: plane leveling, profiles leveling, three-point leveling, facet leveling, polynomial background removal, leveling along user-defined lines
  • Value reading, distance, and angle measurement
  • Profiles: profile extraction, measuring distances in profile graph, and profile export
  • Filtering: mean, median, conservative denoise, Kuwahara, minimum, maximum, and checker pattern removal
  • General convolution filter with user-defined kernel
  • Statistical functions: Ra, RMS, projected and surface area, inclination, histograms, 1D and 2D correlation functions, PSDF, 1D and 2D angular distributions, Minkowski functionals, and facet orientation analysis
  • Statistical quantities calculated from area under arbitrary mask
  • Row/column statistical quantities plots
  • ISO roughness parameter evaluation
  • Grains: threshold marking and un-marking, and watershed marking
  • Grain statistics: overall and distributions of size, height, area, volume, boundary length, and bounding dimensions
  • Integral transforms: 2D FFT, 2D continuous wavelet transform (CWT), 2D discrete wavelet transform (DWT), and wavelet anisotropy detection
  • Fractal dimension analysis
  • Data correction: spot remove, outlier marking, scar marking, and several line correction methods (median, modus)
  • Removal of data under arbitrary mask using Laplace or fractal interpolation
  • Automatic XY plane rotation correction
  • Arbitrary polynomial deformation on XY plane
  • 1D and 2D FFT filtering
  • Fast scan axis drift correction
  • Mask editing: adding, removing or intersecting with rectangles and ellipses, inversion, extraction, expansion, and shrinking
  • Simple graph function fitting, critical dimension determination
  • Force-distance curve fitting
  • Axes scale calibration
  • Merging and immersion of images
  • Tip modeling, blind estimation, dilation and erosion

A video optical microscope in an AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach. The NP AFM includes a high performance video optical microscope along with a 3 camera, light source, microscope stand, and Windows software for displaying images.

TT AFM Video Optical Microscope shows test structureHere the video optical microscope allows viewing features on a test structure. The AFM cantilever is on the right. Three images show results of areas selected for AFM scanning.

NP AFM Video Microscope on HOPGThe video optical microscope zooms in to show an HOPG sample surface and the AFM cantilever.

 

NP AFM Introduction from AFMWorkshop on Vimeo.

PROBE HOLDER/EXCHANGE

The NP AFM utilizes a unique probe holder/exchange mechanism. Probes are held in place with a spring device that mates with a probe exchange tool.

This combination makes changing probes fast and easy on the NP AFM.

Step 1 - Pull the probe clip back, place the probe on the probe holder
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STEP 1
Pull the probe clip back, place the probe on the probe holder

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 .

Step 2 - Lift the clip up and move it forward over the probe chip

STEP 2
Lift the clip up and move it forward over the probe chip

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 .

Step 3 - Drop the probe clip onto the probe clip

STEP 3
Drop the probe chip onto the probe clip

 .

 .

Patterned Wafer Analysis

An atomic force microscope is a very high resolution stylus profiler capable of making several types of measurements on processed wafers. The following is an example of measurements on a patterned wafer that was polished by CMP.

Below is a video microscope image of a the region where the three measurements are made. Also visible in the video microscope image is the cantilever; the red is from the laser used in the AFM force sensor. The regions where measurements are made are identified as 1, 2 and 3 in the video microscope image.

video microscope image of patterned wafer and AFM cantilever

Region 1 - Visualization

Scanning on the square identified as region 1 results in the AFM image illustrated below. At random locations in the image there are pockmarks, not visible in the video microscope image. By zooming in with the AFM, we can see in the right image that the pockmarks have debris at their edges. The width of the pockmarks is about 90 nm and the depth is 10nm.

AFM scan revealing pockmarks, .5 µm x .5 µm

Region 2 - Surface Texture

Scans of region 2 do not show noticeable surface structure, as was observed in region 1. A 3-D color scale image of region 2 is shown below. The surface roughness (Sa) of this region is 1.69 nm which is 10 times greater than the noise floor of the AFM used for generating this image.

10 µm x 10 µm AFM scan showing surface roughness of patterned wafer
Parameters  
Average value: 15.43 nm
Minimum: 7.12 nm
Maximum: 29.85 nm
Median: 15.39 nm
Ra (Sa): 1.69 nm
Rms (Sq): 2.11 nm
Skew: 0.135
Kurtosis: 0.05
Surface area: 100.166 μm²
Projected area: 100.000 μm²
Inclination θ: 0.0 deg
Inclination φ: -71.8 deg

Region 3 - Step Height Measurements

Region 3 is a series of lines that are about 1 µm wide, and are visible in the video optical microscope. An AFM image of these lines is illustrated below. Using a histogram of the AFM image the height of the lines is readily measured to be 43 nm.

Atomic force microscope scan of patterned wafer 1 µm lines and histogram for height of 43 nm

 

Interesting Images

40 X 40 micron, 3-D display of an ink drop place on the conductive trace

 

40 X 40 micron, 3-D display of an ink drop place on the conductive trace.

12 X 12 micron 2-D view of a grating pattern with a 0.5 micron pitch

 

12 X 12 micron 2-D view of a grating pattern with a 0.5 micron pitch.

5 X 5 micron 3-D display a pattern stamped into a polymer sample

 

5 X 5 micron 3-D display a pattern stamped into a polymer sample.

2 X 2 micron 3-D display of the a pattern stamped in a polymer sample. The spacing between feature is 0.25 microns

 

2 X 2 micron 3-D display of the a pattern stamped in a polymer sample. The spacing between feature is 0.25 microns.

 

Hologram Metrology

Color scale image of a hologram pattern
Line profile showing the height of the features in the hologram are 2.8 microns

 

Left: Color scale image of a hologram pattern.

Top: Line profile showing the height of the features in the hologram are 2.8 microns.

Color scale image of a hologram pattern
Line profile showing the height of the features in the hologram are 2.8 microns

 

Left: Color scale image of a hologram pattern.

Top: Line profile showing the height of the features in the hologram are 2.8 microns.

 

Grating Metrology

1 X 1 micron scan of a holographic grating
Line profile showing the height of the features in the hologram are 2.8 microns

 

Left: 1 X 1 micron scan of a holographic grating.

Top: Line profile of the holographic grating. The pitch is .271 microns and the height is 57 nm.

2 X 1 micron scan of a grating
Line profile of the grating. The pitch is .5 microns and the height is 117 nm

 

Left: 2 X 1 micron scan of a grating.

Top: Line profile of the grating. The pitch is .5 microns and the height is 117 nm.

The NP AFM includes the MOST COMMONLY USED AFM MODES.

They are:

Vibrating (Tapping)
Vibrating Mode (tapping) Vibrating mode imaging is the most commonly used mode for measuring topography images with an AFM. In vibrating mode the vibration amplitude of the probe is held constant during a scan. Adjustable parameters include the vibrating frequency, amplitude of vibration, and the amount of dampening of the vibrating probe.

 

Non-vibrating (Contact)
Non-vibrating Mode (contact) In non-vibrating mode, commonly called contact mode, the deflection of a cantilever is held constant during scanning. This mode is often used for scanning in liquids and is also used for measuring force-distance curves.

 

Phase Mode
Phase Mode Phase mode images are measured in vibrating mode and are useful for identifying different areas of hardness on a surface. The technique operates by measuring the phase change caused by differing materials on a surface while scanning.

 

Lateral Force
Lateral Force Lateral force mode measures the local friction a probe senses as it is scanned across a surface. The friction can be caused by surface texture and differing chemical composition.

 

Basic Force/Distance
Basic Force/Distance Force-Distance curves measure the deflection of a cantilever as it interacts with a surface. Force-Distance measurements monitor such surface parameters as: Adhesion, Stiffness, Compliance, Hardness, and Contaminate Thickness. This simple AFM module allows measurements of force-distance curves. It can be upgraded to the Advanced Force-Distance module (see below).

 

 

Optional Modes

OPTIONAL MODES that can be purchased with the NP AFM include:

Magnetic Force
Magnetic Force Measures surface magnetic field by incorporating a magnetic probe into the AFM. MFM is used to generate images of magnetic fields on a surface, and is particularly useful in the development of magnetic recording technology. Magnetic fields associated with individual magnetic nanoparticles can also be revealed through MFM.

 

Electric Force
Electrostatic Force Microscopy (EFM) is a type of dynamic non-contact atomic force microscopy where the electrostatic force is probed. “Dynamic” here means that the cantilever is oscillating and does not make contact with the sample. This force arises due to the attraction or repulsion of separated charges.

 

Advanced F/D
Advanced F/D Force-distance curves measure the deflection of a cantilever as it interacts with a surface. Force-Distance measurements monitor such surface parameters as: adhesion, stiffness, compliance, viscoelasticity, and surface layer thickness. This advanced AFM module is flexible and enables many types of experiments.

 

Force Distance Curve Analysis Software
Force Distance Curve Analysis Software ISFVEM is a fast, intuitive software program for the analysis of a single force distance curve or a grid of curves generated with the AFMWorkshop advanced force distance acquisition software.

 

Conductive AFM
Conductive AFM The C-AFM measures topography and conductivity images simultaneously. This option allows measuring current-voltage (I/V) curves at specific locations on a surface. This can be highly useful in development of microelectronics.

 

Lithography
Lithography This NanoLithography software option enables the AFM probe to alter the physical or chemical properties of the surface. Created in LabVIEW and integrated with the AFM Control software. This software allows the customer to design their own nanolithographic patterns to be written to the sample surface. VI’s are available to customers who want to modify the software and create new capabilities.

 

Open Liquid Cell
Open Liquid Cell This option includes a special probe holder and open liquid cell for scanning samples submerged in liquids. The Dunk and Scan can directly replace the TT-2 probe holder.

 

Scanning Kelvin Probe Microscopy (SKPM)
Scanning Kelvin Probe Microscopy (SKPM) SKPM measures the potential difference between a conductive probe and a conductive sample. The SKPM measurement is made by monitoring the output of a feedback loop that adjusts the potential on a probe so that the potential difference between the probe and surface is zero.

 

Scanning Tunneling
Scanning Tunneling Microscopy (STM) n the STM, the current flow between a metal probe and a sample is used to control the distance between the conductive probe and conductive surface. When the probe is scanned across the surface, if the current between the probe and surface are held constant with a feedback control loop driving a piezo ceramic, the topography of the sample’s surface is measured. This also allows measurement of localized I/V curves.
Scanning Kelvin Probe (SKPM) SKPM measures the potential difference between a conductive probe and a conductive sample. Learn More
Electric Force Microscopy EFM) Using two pass scanning, the electric charge at a surface is imaged. Learn More
Scanning Tunneling (STM) The current flow between the probe and sample is used to control the feedback loop in the microscope when scanning electrically conductive samples. Learn More
Dunk and Scan - Open Liquid Cell Open liquid cell for scanning samples submerged in liquids. Can directly replace the TT-2 AFM probe holder of the NP, SA, or LS-AFM probe holder. Learn More
Lithography Uses an AFM probe to alter the physical or chemical property of a sample surface. Learn More
Advanced Force/Distance Measures the deflection of a cantilever as it interacts with a surface. Monitors parameters such as: Adhesion, Stiffness, Compliance, Hardness, and Contaminate Thickness. Learn More
Magnetic Force Measures the surface magnetic field of a sample by incorporating a magnetic probe into the AFM. Learn More
Vacuum Box A compact, self-contained vacuum system designed to securely hold wafers, discs, and other flat samples on a vacuum chuck. Learn More
Force Distance Curve Analysis Software Force Distance Curves measure the deflection of a cantilever as it interacts with a surface. Learn More
Image Logger This option allows display of six channels in the forward and reverse direction. It has a spectrum function as well as a six channel data logger. Learn More
Break Out Box BNC gives access to most of the signals in the Ebox. Learn More
Scanner: Tip Scanning Z with Strain Gauge 17µm Piezoelectric ceramic holder offering 17 micron Z-axis displacement closed-loop feedback control. Learn More
Scanner: Tip Scanning Z 7µm High-resolution 7 micron vertical scanning module optimizing z-axis position consistency. Learn More
Q-Box/Q-Base The Q-Box is a unique vibration solution that reduces both sound and structural vibrations. Learn More

50 MICRON XY SCANNER

Type Modified Tripod
xy Linearity < 1%
xy Range > 50 μm
xy Resolution < 3 nm closed loop
< 0.3 nm open loop
xy Actuator type Piezo
xy Sensor type Strain Gauge

 

17 MICRON Z SCANNER / PROBE HOLDER

Noise < 0.2 nm
Strain Gauge Resolution 1 nm
Tip Angle 10°
Z Linearity < 5%
Z Linearity-Sensor < 1%

 

7 MICRON Z SCANNER / PROBE HOLDER

Noise < 0.12 nm
Strain Gauge Resolution na
Tip Angle 10°
Z Linearity < 5%

 

LIGHT LEVER AFM FORCE SENSOR

Probe Types Industry-standard
Probe Insertion Manual
Probe Exchange Tool
Probe Holding Mechanism Clip
Vibrating Mode Piezo
Electrical Connector
to Probe
Laser/Detector Adjustment Range +/- 1.5 mm
Adjustment Resolution 1 μm
Minimum Probe to Objective 25 mm
Laser Type 670 nm Diode, < 3 mW
Laser Focus < 25 μm
Detector
Type 4 Quadrant
Band Width > 500 kHz
Signals Transmitted TL, BL, TR, BR
Gain Low, High Settings
Probe sample angle 10°

 

SOFTWARE

Environment LabVIEW™
Operating System Windows
Image Acquisition Real Time Display
(2 of 8 channels)
Control Parameters
PID Yes
Setpoint Yes
Range Yes
Scan Rate Yes
Image Rotate 0° and 90°
Laser Align Yes
Vibrating Freq. Display Yes
Force Distance Yes
Tip Approach Yes
Oscilloscope Yes
Image Store Format Industry-standard
Image Pixels 16 x 16 to 1024 x 1024
H.V. Gain Control XY and Z
Real Time Display Line Level,
Light Shaded,
Grey Color Palette
Calibration System Window
Probe Center Yes

DIGITAL DATA INPUT OUTPUT

Connection USB
Scanning DAC
Number 2
Bits 24
Frequency 7 kHz
Control DAC
Number 2
Bits 14
Frequency 2 kHz
ADC
Number 8
Bits 14
Frequency 48 kHz

 

Z MOTION

Type Direct Drive
Range 25 mm
Drive Type Stepper Motor
Min. Step Size 3330 nm
Slew Rate 8 mm/minute
Limit Switch Top, Bottom
Control Software – Rate,
Step Size

 

ANALOG ELECTRONICS

Vibrating Mode
Freq Range 2 kHz – 800 kHz
Output Voltage 10 Vpp
Demod. Freq TBD
Z Feedback
Type PID
Bandwidth > 3 kHz
Sample Hold Yes
Voltage 0 – 150 V
XY Scan
Voltage 0 – 150 V
Bandwidth > 200 Hz
Pan & Zoom 22 Bits
Tip Approach Cutoff < 20 μm sec.

 

VIDEO MICROSCOPE SPECIFICATION

  Minimum Zoom Maximum Zoom
Field of View 2 x 2 mm 300 × 300 µm
Resolution 20 µm 2 µm
Working Distance 114 mm 114 mm
Magnification 45 × 400 ×

 

NP-AFM-4012

Overall XY Range 2” x 3”
(5 mm x 7.6 mm)
Resolution 3 μm
Max. Sample Size 6” x 6” x 1/2”
(150 mm x 150 mm x 12 mm)

 

NP-AFM-4022

8” (200 mm) Diameter Vacuum Chuck
Linear Range 4” (100 mm)
Rotational Range 360°
Secondary Manual XY – 1/4” (6 mm)
Vacuum Required

 

SAMPLE HOLDER

Type Vacuum Chuck
Max. Lateral Dimensions 200 mm
Max. Height 25 mm
Rotational Range 360°

 

* Z Noise performance depends greatly on the environment the NP-AFM is used in. Best Z noise performance is obtained in a vibration free environment.

** Every effort is made to present accurate specifications, however, due to circumstances beyond AFMWorkshop’s control, specifications are subject to change.

 

NP AFM Product Datasheet PDFPDF icon

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* see terms

Our Warranty

AFMWorkshop stands behind its products. We offer a two year return to factory warranty with every AFM we offer.

 

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