|High Resolution Video Microscope||Readily locate Features for Scanning|
|Multiple Sample Stage or Vacuum Chuck||Optimized for specific technical samples|
|Closed Loop XY scanner||Great accuracy with rapid zoom to feature|
|Probe Exchange Tool||Reduce time for probe exchange|
|In plane flexure XY scanner||Minimal out of plane motion in images|
|Labview software with USB communication||Readily adaptable to new operating systems|
|Uses Industry standard probes||Probes for specific measurements are readily available.|
|Includes Vibrating, Non-Vibrating modes||Turnkey system|
|Download:||NP-AFM Product Datasheet PDF|
Nano-Profiler AFM Overview
The NP-AFM is a complete nanoprofiler tool including everything required for scanning samples: microscope stage, electronic box, control computer, probes, manuals, and a video microscope. Samples as large as 200 mm X 200 mm X 20 mm are profiled by the NP-AFM system, and several stage options are available for many types of samples. The Nano-Profiler AFM is primarily used for routine scanning of technical samples such as wafers and disks or for nanotechnology research.
Key Features of the NP-AFM
The NP-AFM accommodates industry-standard sized probes and is used for profiling technical samples including wafers and disks in industry applications.
Standard Operating Modes
Vibrating mode is used for high resolution and soft samples, while non-vibrating mode can be used for routine scanning. Also included with the system are phase and lateral force modes
Three Sample Stage Options
Three sample stage options can accommodate different samples with sizes as large as 200mm X 200mm X 20mm.
Linearized X, Y Piezoelectric Scanner
Piezoelectric X and Y scanners incorporate strain gauges that provide linear scans and rapid zoom-to-feature capabilities.
Direct-Drive Tip Approach
A linear motion stage is used to move the probe perpendicular to the sample. Probe angle alignment is not required, facilitating a much faster probe approach.
Industry standard programming environment, functions include setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. Compatible with older operating systems as well.
The video optical microscope in a NP-2 AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach.
Visualization of Surface Features
Visualization of surface features can help understand why a process is working or not working. AFM offers extreme contrast on flat samples often encountered in industry wafers and disks for quality control and assurance.
Surface roughness measurements at the nanoscale are only possible with an atomic force microscope. With the appropriate vibration isolation enclosure, it is possible to measure surface textures under 0.1 nm.
The NP-AFM is a stylus profiler capable of making step height measurements from 0.3 to 500 nanometers. An included video microscope is essential for locating regions of interest for scanning.
Patterned Wafer Analysis
An atomic force microscope is a very high resolution stylus profiler capable of making several types of measurements on processed wafers. The following is an example of measurements on a patterned wafer that was polished by CMP.
Below is a video microscope image of a the region where the three measurements are made. Also visible in the video microscope image is the cantilever; the red is from the laser used in the AFM force sensor. The regions where measurements are made are identified as 1, 2 and 3 in the video microscope image.
Region 1 - Visualization
Scanning on the square identified as region 1 results in the AFM image illustrated below. At random locations in the image there are pockmarks, not visible in the video microscope image. By zooming in with the AFM, we can see in the right image that the pockmarks have debris at their edges. The width of the pockmarks is about 90 nm and the depth is 10nm.
Region 2 - Surface Texture
Scans of region 2 do not show noticeable surface structure, as was observed in region 1. A 3-D color scale image of region 2 is shown below. The surface roughness (Sa) of this region is 1.69 nm which is 10 times greater than the noise floor of the AFM used for generating this image.
Region 3 - Step Height Measurements
Region 3 is a series of lines that are about 1 µm wide, and are visible in the video optical microscope. An AFM image of these lines is illustrated below. Using a histogram of the AFM image the height of the lines is readily measured to be 43 nm.
More Details about the NP-AFM
To read more about the NP-AFM, return to the top of the page and click on the various tabs detailing the NP-AFM and its Stage; Ebox; Software; Video Microscope; Probe Holder; Modes; Options; Specifications; and Images.
You can also see our NP-AFM Introduction video below: