SA AFM

Name: Atomic Force Microscopes for High-Resolution Scanning - AFMWorkshop
Address: 1434 E 33rd St., Signall Hill, CA, US
Telephone: 1 (888) 671-5539
Price range: $19495 - $68,887

Standalone AFM
Open design for maximum flexibility

Because the probe on the SA AFM extends below the stage structure the SA AFM is capable of scanning all sizes and shapes of samples. The SA AFM includes a direct drive Z approach motor, high resolution on axis video microscope, linearize pizo XYZ scanner, and an industry standard light lever.

Price Range*

$41,340.00 -

$94,520.00

* Prices vary depending on options purchased, importation taxes, installation and training fees.

Click to Submit Inquiries or Questions

Description

SA-AFM Details

Overview

Stage

EBOX

Software

Video Microscope

Probe Holder

Gallery

Modes

Options

Specifications

Open Frame Design	Any sized sample can be scanned
Includes bottom plate	Allows for scanning small samples
Probe Exchange Tool Included	Reduce time for probe exchange
Includes top view video microscope	Facilitates tip approach and laser alignment
Includes vibrating, non-vibrating, phase, LFM, and advanced F/D	Most common scanning modes included for many applications
Flexible Sample holder	Can be used with most commercially available probes
Labview software with USB communication	Readily adaptable to new operating systems
Pricing	From $41,340.00* *Plus selected Z Scanner
Download:	SA AFM Product Datasheet PDF 3-D model of SA AFM

Overview: Stand-Alone Atomic Force Microscope (SA AFM)

Use the SA AFM for scanning almost any size and sape of sample. The stage can sit on top of an inverted microscope, a large structure, or on the optional xy sample stage. This tip scanning unit has an linearized XY scan range of 40 microns, and two different Z ceramics: a 7 micron high resolution Z scanner, and a large motion 17 micron Z scanner.

Advanced Features of the SA AFM Include:

Flexible, stand alone design
Scans any sample size
Adaptable to inverted microscopes
Linearized xy piezoelectric scanner
Accommodates widest range of standard AFM probes
All standard modes, including vibrating, non-vibrating, and phase
Direct drive motorized probe approach
Intuitive LabVIEW-based software for image capture

Using the industry standard light lever force sensor, all standard scanning modes are included with the system. Vibrating mode is used for high resolution and soft samples, while non-vibrating mode can be used for routine scanning. Also included with the system are phase and lateral force modes.

Control software, written in LabVIEW, is simple and intuitive to use. Differing windows walk users through the process: a pre-scan window helps align the AFM probe, a scanning window aids in acquiring images, a force position window measures force distance curves, and finally, a system window assists in altering system parameters.

More Details about the SA AFM

To read more about the SA AFM, return to the top of the page and click on the various tabs detailing the SA AFM and its Stage; Ebox; Software; Video Microscope; Probe Holder; Modes; Options; Specifications; and Images.

High Resolution Z Stage
The direct drive’s Z stage controls motion down to 330 nm, assuring optimal tip approach. Software controls for the Z stage rapidly move the light lever up and down and regulate the automated probe approach.

Light Lever Force Sensor
An industry standard light lever force sensor is utilized in the SA AFM. The probe holder accommodates the widest range of commercially available AFM probes. The light lever force sensor can make measurements in standard modes, including vibrating, non-vibrating, lateral force, and phase mode.

Video Microscope
The high resolution video microscope has a zoom tube which allows a field of view between 2 X 2 mm and .3 X .3 mm. The video microscope is essential for aligning the light lever laser, locating features for scanning, and facilitating tip approach.

XY Piezoelectric Scanner
For XY scanning, linearized piezoelectric ceramics utilize real time feedback control to assure accurate measurements. The multiple modified tripod design (MMTD) of the xy scanner provides scans with minimal background bow.

Probe Holder
A modular probe holder is used in the light lever force sensor and held in place with a spring clip. Probes can be replaced in less than two minutes with the probe exchange tool. Additionally, the probe holder spring clip can be used to supply voltages to the AFM probe for techniques such as conductive AFM.

Large objects that will not fit in a traditional stage may be imaged with the SA AFM. In this example, the monitor of a commercial AFM is being imaged.

Electronics in the SA AFM are constructed around industry standard USB data acquisition electronics. The critical functions, such as xy scanning, are optimized with a 24-bit digital to analog converter. With the analog z feedback loop, the highest fidelity scanning is possible. Vibrating mode scanning is possible with both phase and amplitude feedback using the high sensitivity phase detection electronics.

24-bit Scan DAC
Scanning waveforms for generating precision motion in the X-Y axis with the piezo scanners are created with 24 bit DACS driven by a 32 bit micro controller. With 24 bit scanning, the highest resolution AFM images may be measured. Feedback control using the xy strain gauges assures accurate tracking of the probe over the surface.

Phase and Amplitude Detector Circuit
Phase and amplitude in the Ebox are measured with highly stable phase and amplitude chips. The system can be configured to feed back on either phase or amplitude when scanning in vibrating mode.

Signal Accessible
At the rear of the eBox is a 50 pin ribbon cable that gives access to all of the primary electronic signals without having to open the eBox.

Precision analog feedback
Feedback from the light lever force sensor to the Z piezoceramic is made using a precision analog feedback circuit. The position of the probe may be fixed in the vertical direction with a sample-and-hold circuit.

Variable Gain High Voltage Piezo Drivers
An improved signal to noise ratio as well as extremely small scan ranges are possible with the variable gain high voltage piezo drivers.

Software for acquiring images is designed with the industry standard LabVIEW™ programming visual interface instrument design environment. There are many standard functions, including setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. LabVIEW™ facilitates rapid development for those users seeking to enhance the software with additional special features. LabVIEW also enables the HR AFM to be readily combined with any other instrument using LabVIEW.

Pre-Scan Tab

All of the functions required before making a scan are on the pre-scan tab. This includes selecting the scan mode, red dot alignment, frequency scan, and automatic tip approach.

Scanning Tab

Images are acquired using the scanning tab. Parameters selected on the scanning tab include the scan size, scan rate, GPID parameters, and the color scale used for displaying images. Included with the scanning tab is an image buffer capability that facilitates in-zooming and out-zooming.

Modes Tabs

Software control for optional modes such as MFM, EFM, and advanced F/D are found in the modes tabs. The example shown here is of the advanced F/D mode tab. This allows fine control of all the parameters controlling acquisition of force-distance curves, as well as acquisition of F-D curve maps. Mapping of curve sin this way allows the user to locate and visualize regions of the sample with varying properties, such as presence of specific molecules, or mechanical properties.

Image Analysis Software

Included with the HR AFM is the Gwyddion open source SPM image analysis software. This complete image analysis package has all the software functions necessary to process, analyze, and display SPM images.

Visualization: false color representation with different types of mapping
Shaded, logarithmic, gradient- and edge-detected, local contrast representation, and Canny lines
OpenGL 3D data display: false color or material representation
Easily editable color maps and OpenGL materials
Basic operations: rotation, flipping, inversion, data arithmetic, crop, and resampling
Leveling: plane leveling, profiles leveling, three-point leveling, facet leveling, polynomial background removal, leveling along user-defined lines
Value reading, distance, and angle measurement
Profiles: profile extraction, measuring distances in profile graph, and profile export
Filtering: mean, median, conservative denoise, Kuwahara, minimum, maximum, and checker pattern removal
General convolution filter with user-defined kernel
Statistical functions: Ra, RMS, projected and surface area, inclination, histograms, 1D and 2D correlation functions, PSDF, 1D and 2D angular distributions, Minkowski functionals, and facet orientation analysis
Statistical quantities calculated from area under arbitrary mask
Row/column statistical quantities plots
ISO roughness parameter evaluation
Grains: threshold marking and un-marking, and watershed marking
Grain statistics: overall and distributions of size, height, area, volume, boundary length, and bounding dimensions
Integral transforms: 2D FFT, 2D continuous wavelet transform (CWT), 2D discrete wavelet transform (DWT), and wavelet anisotropy detection
Fractal dimension analysis
Data correction: spot remove, outlier marking, scar marking, and several line correction methods (median, modus)
Removal of data under arbitrary mask using Laplace or fractal interpolation
Automatic XY plane rotation correction
Arbitrary polynomial deformation on XY plane
1D and 2D FFT filtering
Fast scan axis drift correction
Mask editing: adding, removing or intersecting with rectangles and ellipses, inversion, extraction, expansion, and shrinking
Simple graph function fitting, critical dimension determination
Force-distance curve fitting
Axes scale calibration
Merging and immersion of images
Tip modeling, blind estimation, dilation and erosion

A video optical microscope in an AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach. The SA AFM includes a high performance video optical microscope along with a 3 camera, light source, microscope stand, and Windows software for displaying images.

Here the video optical microscope allows viewing features on a test structure. The AFM cantilever is on the right. Three images show results of areas selected for AFM scanning.

The video optical microscope zooms in to show an HOPG sample surface and the AFM cantilever.

7 to 1 Mechanical Zoom

With a 7:1 mechanical zoom, it is possible to use a large field of view to locate features for imaging. It is then possible to zoom in to get very high resolution video microscope images.

SA AFM Introduction from AFMWorkshop on Vimeo.

The SA AFM utilizes a unique probe holder/exchange mechanism. Probes are held in place with a spring device that mates with a probe exchange tool. This combination makes changing probes fast and easy on the SA AFM.

SA AFM Measurements

In addition to measuring surface structure, the SA AFM is ideal instrument for modes measurements.

For example these images are of a polymer sample. The image at left is a topography image, and the image at right is the phase image, measuring the relative hardness of the polymer sample.

AFM system measuring of the relative hardness of the polymer sample

Surface Texture

SA AFM 2 pm measuring of semiconductors and other micro-fabricated devices

Polished Surface - 30 x 30 x 5 µm

Surface texture on polished and machined surfaces is readily measured with the SA AFM. With the SA's flexible stage design, fixtures for holding almost any sample shape can be created. Once measured, the AFM images can be analyzed and standard surface texture parameters such as Ra are readily calculated.

Dimensional

Calibration reference - 40 x 40 x 1 µm

Atomic force microscopes are capable of accurately measuring the dimensions of semiconductor and other micro-fabricated devices. Because the SA AFM accommodates commercially available AFM probes, specialized probes for metrology measurements can be used.

Visualization

Cells - 8 x 8 µm

One of the most powerful capabilities of the SA AFM is the capability to visualize surface structure. Although not easily quantified, the surface texture of this cell structure is readily visualized.

Features that may be readily visualized with the SA AFM range in size from a few nm to a few µm.

Modes included with the SA AFM:

Non-Vibrating (contact)	In non-vibrating mode the deflection of the cantilever is held constant as the sample is scanned. This mode is used for hard samples, and for training purposes.
Vibrating (tapping)	A piezoelectric ceramic is used to vibrate the cantilever at resonance. The amplitude of vibration is held constant as the sample is scanned. Both soft and hard samples are scanned with vibrating mode.
Phase	While scanning in vibrating mode and holding the cantilever vibration amplitude constant, the phase shift between the drive signal and photo-detector are displayed. The phase image gives a map of the relative hardness at a sample's surface.
Frictional Force	With the 4 segmant photodetector in the TT-2 AFM the L-R signal can be captured and displayed while scanning.
Advance F/D	The advanced forc distance modes software allows force mapping, making curves from a non-feedback position, and controlling the inbound and outbound rates.
Dunk-n-Scan	With the dunk-n-scan liquid cell, images of samples submerged in liquids can be made.

Z Scanner for Liquid Imaging

Dunk-n-Scan cell for liquid imaging of samples

Optional SA AFM Modes:

The following modes may be purchase as options with the SA AFM.

Conductive AFM (C-AFM)

Magnetic Force Microscopy (MFM)

Lithography

Scanning Thermal Microscopy (SThM)

Scanning Tunneling Microscope (STM)

Electric Force Microscopy (EFM)

XY Sample stage

The optional base with XY translator gives added flexibility to the SA AFM. By removing the inverted light microscope, noise floors as low as 100 picometers are achievable. The XY translator range is 12 X 12 mm with a resolution of 1 micron. At the top of the XY translator are magnets for holding standard AFM sample disks.

Vibration Solution

Performance of the SA AFM is greatly improved with the acoustic enclosure combined with an active vibration table. The option includes:

- Acoustic Cabinet
- Active Vibration Table
- Base

Modes

The following modes are available for the SA AFM:

Conductive AFM (C-AFM)

Magnetic Force Microscopy (MFM)

Lithography

Scanning Thermal Microscopy (SThM)

Scanning Tunneling Microscope (STM)

Electric Force Microscopy (EFM)

Scanning Kelvin Probe Microscopy (SKPM)

50 Micron XY Scanner

Type	Modified Tripod
XY Linearity	< 1%
XY Range	> 50µm
XY Resolution	< 3 nm closed loop < 0.3 nm open loop
XY Actuator type	Piezo
XY Sensor type	Strain Gauge

16 Micron Z Scanner / Probe Holder

Noise	< 0.2 nm
Strain Gauge Resolution	1 nm
Tip Angle	10 °
Z Linearity	< 5%
Z Linearity-Sensor	< 1%

7 Micron Z Scanner / Probe Holder

Noise	< 0.12 nm
Strain Gauge Resolution	na
Tip Angle	10°
Z Linearity	< 5%

Light Lever AFM Force Sensor

Probe Types	Industry Standard
Probe Insertion	Manual Probe Exchange Tool
Probe Holding Mechanism	Clip Vibrating Mode Piezo Electrical Connector to Probe
Laser/Detector Adjustment Range	+/- 1.5 mm
Adjustment Resolution	1 µm
Minimum Probe to Objective	25 mm
Laser Type	670 nm Diode, < 3 mW
Laser Focus	<25 µm

Detector

Type	4 Quadrant
Band Width	> 500 kHz
Signals Transmitted	TL, BL, TR, BR
Gain	Low, High Settings
Probe sample angle	10 degrees

Digital Data Input Output

Connection	USB
Scanning DAC
Number	2
Bits	24
Frequency	7 kHz
Control DAC
Number	2
Bits	14
Frequency	2 kHz
ADC
Number	8
Bits	16
Frequency	48 kHz

Z Motion

Type	Direct Drive
Range	25 mm
Drive Type	Stepper Motor
Min. Step Size	330 nm
Slew Rate	8 mm/minute
Limit Switch	Top, Bottom
Control	Software – Rate, Step Size

Analog Electronics
»Vibrating Mode

Freq Range	2 kHz – 800 kHz
Output Voltage	10 Vpp
Demod. Freq	TBD

»Z Feedback

Type	PID
Bandwidth	> 3 kHz
Sample Hold	Yes
Voltage	0-150 V

»xy Scan

Voltage	0 – 150 V
Bandwidth	> 200 Hz
Pan & Zoom	22 Bits

Software

Environment	LabVIEW
Operating System	Windows 7
Image Acquisition	Real Time Display (2 of 8 channels)

Control Parameters

PID	Yes
Setpoint	Yes
Range	Yes
Scan Rate	Yes
Image Rotate	0 and 90 °
Laser Align	Yes
Vibrating Freq. Display	Yes
Force Distance	Yes
Tip Approach	Yes
Oscilloscope	Yes
Image Store Format	Industry Standard
Image Pixels	16 x 16 to 1024 x 1024
H.V. Gain Control	XY and Z
Real Time Display	Line Level, Light Shaded, Grey Color Palette
Calibration	System Window
Probe Center	Yes

Video Microscope

Minimum Zoom

Maximum Zoom

Field of view

2 x 2 mm

300 x 300 µm

Resolution

20 µm

1.5 µm

Working Distance

114 mm

Magnification

45X

400X

Computer

Industry Standard Computer & Monitor (laptop available upon request)
Windows 7
AFMWorkshop LabVIEW .exe installed

Stage

Back and side view of the SA AFM stage without the AFM/video microscope. The feet at the bottom may be removed if the stage is rigidly mounted to a surface.

* Z Noise performance depends greatly on the environment in which the SA AFM is used. Best Z noise performance is obtained in a vibration free environment.

** Every effort is made to present accurate specifications; however, due to circumstances beyond AFM Workshop’s control, specifications are subject to change.

SA AFM Product Datasheet PDF

View all AFM products

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AFMWorkshop stands behind its products. We offer a two year return to factory warranty with every AFM we offer.

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AFMWorkshop
10 Capital Drive
Hilton Head Island
South Carolina, 29926

Phone: 1 (888) 671-5539
Mail: Infoafmworkshop.com
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All instrumentation from AFMWorkshop has an open design to facilitate customization.

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SA AFM

SA-AFM Details

Overview: Stand-Alone Atomic Force Microscope (SA AFM)

More Details about the SA AFM

Pre-Scan Tab

Scanning Tab

Modes Tabs

Image Analysis Software

7 to 1 Mechanical Zoom

SA AFM Measurements

Surface Texture

Dimensional

Visualization

Modes included with the SA AFM:

Z Scanner for Liquid Imaging

Optional SA AFM Modes:

XY Sample stage

Vibration Solution

Modes

Video Microscope

Computer

Stage

Our Guarantee

Our Warranty

Our Lists

ESSENTIALS

EXPLORE

Open Architecture

Training & Support

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