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Vibrating AFM Probe

ACTA

Applied NanoStructures ACTA probes are silicon probes designed for Non-Contact, Tapping Mode, Intermittent Contact, and/or Close Contact applications. These probes have a high frequency that allows for faster scanning speeds, and have Aluminum coating on the reflex side to increase laser signal quality.

Tip Specifications

Material: Silicon
Shape: Pyramidal
Height (μm): 14-16
Aspect Ratio: 1.5-3.0
ROC* (nm): 6
Coating: None
*Nominal specification; guaranteed < 10nm

Cantilever Specifications

Material: Silicon
Shape: Rectangular
Reflex Coating: Al, 30 nm ± 5


Parameter Nominal Value Minimum Value Maximum Value
Spring Constant (N/m) 40 25 75
Frequency (kHz) 300 200 400
Length (μm) 125 115 135
Width (μm) 35 30 40
Thickness (μm) 4.5 4.0 5.0