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This reference sample, manufactured by Applied Nanostructures, is used for calibrating both an optical microscope and an AFM. The reference features are nominally 100 nm high and there is a series of line and square patterns. The reference is 1 X 1 cm and it is 0.4 cm thick.
Test Pattern Locations and Sizes
| Feature |
Description |
Details |
| A |
Square Grid |
3 μm Pitch |
| B |
Square Grid |
10 μm Pitch |
| C |
Grating |
3 μm Pitch |
| D |
Grating |
10 μm Pitch |
| E |
Grating |
20 μm Pitch |
| F |
Grating |
50 μm Pitch |
| G |
Square Grid |
100 μm x 100 μm |
| H |
Rectangular Line |
1000 μm x 200 μm |
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