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This X-Y stage is constructed from two linear stages. The table size on the stage is 65 X 65 mm.
Specifications
| Table size |
65 × 65 mm |
| Actuator type |
Micrometer head type |
| Micrometer head position |
Side |
| Travel distance |
± 12.5 mm |
| Minimum readout (resolution) |
10 μm |
| Minimum adjust distance |
2 μm |
| Positional accuracy |
3 μm |
| Travel guide |
Precision V-groove & crossed roller |
| Load capacity (horizontally) |
10 kg |
| Straightness |
2 μm |
| Pitching |
25″ |
| Yawing |
15″ |
| Parallelism |
15 μm |
| Driving parallelism |
7 μm |
| Permissible moment load (N.m) |
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Pitching |
2.7 N.m |
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Yawing |
2.2 N.m |
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Rolling |
2.0 N.m |
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| Moment rigidity |
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Pitching |
0.38″/N.cm |
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Yawing |
0.42″/N.cm |
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Rolling |
0.28″/N.cm |
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| Weight |
0.8 kg |
| Material |
Aluminum alloy |
| Finish (surface treatment) |
Black-anodized |
Drawing
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